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arxiv: 2411.03946 · v1 · pith:JKIZQRWLnew · submitted 2024-11-06 · ⚛️ physics.optics

Optomechanical microgear cavity

classification ⚛️ physics.optics
keywords cavitymechanicalmicrogearoptomechanicalconfigurationopticalaboveachieve
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We introduce a novel optomechanical microgear cavity for both optical and mechanical isotropic materials, featuring a single etch configuration. The design leverages a conjunction of phononic and photonic crystal-like structures to achieve remarkable confinement of both optical and mechanical fields. The microgear cavity we designed in amorphous silicon nitride exhibits a mechanical resonance at 4.8 GHz, and whispering gallery modes in the near-infrared, with scattering-limited quality factors above the reported material limit of up $10^7$. Notably, the optomechanical photoelastic overlap contribution reaches 75% of the ideal configuration seen in a floating ring structure.

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