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arxiv: cond-mat/0506226 · v1 · submitted 2005-06-09 · ❄️ cond-mat.other

On the Casimir effect in the microelectromechanical systems MEMS

classification ❄️ cond-mat.other
keywords memscasimireffectequationklein-gordonthermaltransportformulated
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In this paper the thermal transport phenomena in MEMS are investigated. The thermal Klein-Gordon transport equation for nanoscale structures is formulated and solved. Key words: MEMS, Klein-Gordon equation, Casimir effect.

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