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arxiv 2407.09740 v2 pith:EQL7DNYG submitted 2024-07-13 cond-mat.mtrl-sci cond-mat.mes-hallcond-mat.supr-con

Ferroelectric AlBN Films by Molecular Beam Epitaxy

classification cond-mat.mtrl-sci cond-mat.mes-hallcond-mat.supr-con
keywords filmsalbnbeamdepositedepitaxyferroelectricmolecularnitride
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We report the properties of molecular beam epitaxy deposited AlBN thin films on a recently developed epitaxial nitride metal electrode Nb2N. While a control AlN thin film exhibits standard capacitive behavior, distinct ferroelectric switching is observed in the AlBN films with increasing Boron mole fraction. The measured remnant polarization Pr of 15 uC/cm2 and coercive field Ec of 1.45 MV/cm in these films are smaller than those recently reported on films deposited by sputtering, due to incomplete wake-up, limited by current leakage. Because AlBN preserves the ultrawide energy bandgap of AlN compared to other nitride hi-K dielectrics and ferroelectrics, and it can be epitaxially integrated with GaN and AlN semiconductors, its development will enable several opportunities for unique electronic, photonic, and memory devices.

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