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arxiv 2311.10340 v1 pith:S2C7LONA submitted 2023-11-17 cond-mat.mes-hall cond-mat.mtrl-sci

Fabrication of damage-free and/or contamination-free sub-um electrodes using PMMA masks

classification cond-mat.mes-hall cond-mat.mtrl-sci
keywords damage-freefabricationrecipescontamination-freedevelopedelectricalfundamentalinterfaces
verification ladder T0 review T1 audit T2 compute T3 formal T4 reserved
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Quality of the electrical contacts and interfaces in various metal/semiconductor/insulator heterostructures is one of the pivotal aspects in both applied and fundamental research areas. For instance, non-optimal contact resistance can limit the overall efficiency of a certain developed technology and thus considerably narrow the range or fully block its practical application. On the other hand in fundamental research it is often the case that the manifestation of targeted phenomenon crucially depends on the level of contamination in the fabricated experimental samples. Here we offer a set of recipes that are aimed at contamination-free and damage-free fabrication of the devices, mostly developed for the two dimensional materials, but nevertheless applicable for a wider range of the systems, where the quality of the interfaces and/or non-invasiveness of the fabrication recipes are important. Our recipes are based on the preparation of the flexible PMMA membranes, with the help of which we can prepare residue-free or damage-free electrical connections to the studied material.

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