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arxiv: 2604.06766 · v1 · submitted 2026-04-08 · ❄️ cond-mat.mes-hall · physics.optics

Self-Assembled Telecom Color Centers in Silicon and Their Growth Environment

Pith reviewed 2026-05-10 17:49 UTC · model grok-4.3

classification ❄️ cond-mat.mes-hall physics.optics
keywords silicon color centersself-assemblymolecular beam epitaxyultra-low temperature growthphotoluminescencetelecom emitterspositron annihilation spectroscopyquantum photonics
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The pith

Ultra-low-temperature molecular beam epitaxy enables controlled self-assembly of telecom color centers in silicon by tuning growth pressure and temperature.

A machine-rendered reading of the paper's core claim, the machinery that carries it, and where it could break.

This paper shows that carbon-doped silicon grown by molecular beam epitaxy at temperatures below 350 degrees Celsius can form specific color centers through self-assembly rather than ion implantation. The authors map how substrate temperature and especially chamber pressure during growth determine which centers appear and how strongly they emit light at telecom wavelengths. Lower pressures reduce unwanted background luminescence by keeping the growth environment clean enough to limit stray impurities and defects. Photoluminescence spectra combined with positron annihilation measurements tie these optical improvements directly to the vacuum conditions maintained during epitaxy.

Core claim

SiCCs such as the W, G, G', and T centers form by self-assembly during kinetically limited growth of carbon-doped silicon at ultra-low temperatures. Their photoluminescence intensities and the surrounding crystal quality vary with substrate temperature and growth pressure, with lower pressures suppressing background luminescence by maintaining a sufficiently pristine environment that prevents incorporation of background impurities.

What carries the argument

Kinetically limited self-assembly of carbon-related point defects into specific color centers during ultra-low-temperature MBE, made possible by a clean vacuum that limits unintended impurity incorporation.

If this is right

  • Specific telecom color centers can be formed in silicon without the vertical straggle or lattice damage caused by ion implantation.
  • Lower growth pressure directly reduces luminescence background, improving the signal-to-noise ratio needed for single-photon sources.
  • The all-epitaxial process is compatible with existing silicon device fabrication flows.
  • Doppler broadening positron annihilation spectroscopy can be used to monitor how growth pressure affects defect density in the matrix around the centers.

Where Pith is reading between the lines

These are editorial extensions of the paper, not claims the author makes directly.

  • The method could enable monolithic integration of quantum emitters directly into silicon photonic circuits without separate implantation or annealing steps.
  • If the yield of desired centers proves high enough under optimized pressure, the approach may support wafer-scale production of silicon-based quantum light sources.
  • Similar pressure-controlled self-assembly might be tested in other low-temperature epitaxial systems to create different defect-based emitters.

Load-bearing premise

The growth chamber can be kept clean enough at ultra-low temperatures that background impurities do not create extra defects that would mask or compete with the desired color centers.

What would settle it

Photoluminescence spectra showing no reduction in background emission when growth pressure is lowered, or positron annihilation spectra showing no corresponding improvement in crystal quality, would indicate that vacuum conditions do not control SiCC formation as claimed.

Figures

Figures reproduced from arXiv: 2604.06766 by Andreas Wagner, Enrique Prado Navarrete, Jacqueline Marb\"ock, Johannes Aberl, Maciej O. Liedke, Merve Karaman, Moritz Brehm, Oliver E. Lang, Thomas Fromherz.

Figure 1
Figure 1. Figure 1: b for the series with undoped Si instead of the Si:C emitter layer. To account for possible unintended SiCC formation within the Si capping layer at relatively low capping temperatures, corresponding reference samples have been grown without the active emitter layer to isolate the contribution of the Si capping layer on the overall luminescence signal. The respective sample structure is pictured in Figure … view at source ↗
Figure 2
Figure 2. Figure 2: Low-temperature PL measurements performed at 15 K of fabricated SiCC samples, grown at different pressures and overgrown at different Tcap. (a) - (d) PL spectra for two identically grown samples except for the background pressure during growth pg in the MBE chamber, ultra-high vacuum (UHV) (dark coloring) and high vacuum (HV) (light coloring) for different cap temperatures Tcap = 200°C (black), 250°C (red)… view at source ↗
Figure 3
Figure 3. Figure 3: c verifies that the self-assembled T Centers (green curve) are fully confined within the 9 nm-thin layers, forming during TG = 200°C, while the increased thermal budget of the Si capping layer growth prevents T-center formation during overgrowth. In the grey reference signal in Figure 3c, no sign of T-center emission is present, and the overall PL count rate is low, implying a good Si matrix quality and T-… view at source ↗
Figure 4
Figure 4. Figure 4: PL spectra of Si deposited at various growth pressures and temperatures. A 50 nm thick Si buffer was grown at 500 - 650°C, followed by 50 nm of Si grown at different temperatures TG = 200°C (black spectra), 300°C (blue), 350°C (violet) and 600°C (orange spectra). Each structure was grown at different vacuum conditions ranging from ~7×10-8 mbar to 10-11 mbar (light to dark coloring of the spectra). Figure 4… view at source ↗
Figure 5
Figure 5. Figure 5: Positron annihilation spectroscopy for Si samples. (a) The S-parameter is a fraction of positrons annihilating with low-momentum valence electrons and represents vacancy-type defects and their concentration. (b) The W-parameter approximates the overlap of the positron wavefunction with high-momentum core electrons. For S at TG = 200°C sample (black squares), many positrons annihilate, the sample growth at … view at source ↗
read the original abstract

Artificial atoms based on color centers in silicon (SiCCs) have recently emerged as promising candidates for highly integrable and scalable key components in photonic quantum technology, including telecom single-photon sources and spin memory devices. A novel all-epitaxial fabrication technique for SiCCs, based on ultra-low-temperature (ULT) molecular beam epitaxy (MBE), addresses limitations of conventional fabrication via ion implantation, such as vertical ion straggle and collateral crystal lattice damage. This method solely relies on self-assembly of SiCCs during kinetically-limited growth of (carbon-doped) Si(:C) at ULTs <~350{\deg}C. The latter requires an extraordinary pristine growth environment to prevent unintended defect formation caused by the incorporation of impurities from the background vapor; however, so far, no study has specifically addressed how exactly the vacuum conditions during epitaxy influence SiCC formation, their optical properties, and the quality of the surrounding crystal matrix. Here, we investigate the impact of the growth pressure and the substrate temperature on the self-assembly and photoluminescence (PL) properties of important SiCCs, such as W, G, G', and T centers. Further, we use PL and Doppler broadening variable energy positron annihilation spectroscopy to emphasize the role of the growth pressure in suppressing the luminescence background, which is crucial for advancing quantum photonics applications.

Editorial analysis

A structured set of objections, weighed in public.

Desk editor's note, referee report, simulated authors' rebuttal, and a circularity audit. Tearing a paper down is the easy half of reading it; the pith above is the substance, this is the friction.

Referee Report

1 major / 2 minor

Summary. The manuscript presents a novel all-epitaxial fabrication technique for silicon color centers (SiCCs) based on ultra-low-temperature molecular beam epitaxy (MBE) of carbon-doped silicon. It systematically investigates the effects of growth pressure and substrate temperature on the self-assembly and photoluminescence (PL) properties of W, G, G', and T centers, while using PL spectra and Doppler-broadening variable-energy positron annihilation spectroscopy to demonstrate that lower pressures suppress luminescence background and reduce defect density in the crystal matrix.

Significance. If the central claims hold, the work offers a damage-free, scalable route to integrating telecom-wavelength color centers in silicon, directly addressing limitations of ion-implantation methods such as straggle and lattice damage. Credit is due for the internal consistency provided by the combined PL and positron-annihilation data that link growth pressure to background suppression and defect reduction, supplying falsifiable experimental evidence for the role of the growth environment.

major comments (1)
  1. Abstract and main results: the claims that pressure and temperature specifically impact PL properties and background suppression are stated without accompanying quantitative metrics (e.g., intensity ratios, linewidth changes, or defect concentrations with error bars), which are required to evaluate the magnitude and statistical significance of the reported effects.
minor comments (2)
  1. The abbreviation ULT should be defined on first use in the main text.
  2. Figure captions for PL spectra and positron data should explicitly state the growth pressures, temperatures, and any normalization procedures used.

Simulated Author's Rebuttal

1 responses · 0 unresolved

We thank the referee for the positive assessment of our work and the recommendation for minor revision. We address the single major comment below.

read point-by-point responses
  1. Referee: Abstract and main results: the claims that pressure and temperature specifically impact PL properties and background suppression are stated without accompanying quantitative metrics (e.g., intensity ratios, linewidth changes, or defect concentrations with error bars), which are required to evaluate the magnitude and statistical significance of the reported effects.

    Authors: We agree that explicit quantitative metrics would improve the clarity and evaluability of the claims. The manuscript presents the relevant trends through PL spectra and Doppler-broadening positron annihilation data in the figures, but does not extract or report specific numerical values (such as peak-to-background intensity ratios, linewidths, or defect concentrations with uncertainties) in the abstract or main text. In the revised version we will add these metrics, including intensity ratios for the W, G, G', and T centers relative to the background, any observed linewidth variations, and defect concentrations from the positron spectroscopy together with error bars where the data permit. revision: yes

Circularity Check

0 steps flagged

No significant circularity

full rationale

The paper is a purely experimental study of ultra-low-temperature MBE growth of silicon color centers. It reports direct measurements (PL spectra, Doppler-broadening positron annihilation) that link growth pressure and temperature to defect density and optical properties. No equations, derivations, fitted parameters presented as predictions, or self-citation chains appear in the provided text. The central claim rests on empirical data rather than any definitional or fitted reduction to its own inputs, making the work self-contained against external benchmarks.

Axiom & Free-Parameter Ledger

0 free parameters · 1 axioms · 0 invented entities

No free parameters, new entities, or non-standard axioms are introduced in the abstract; the work relies on established MBE growth and spectroscopic techniques.

axioms (1)
  • domain assumption Standard assumptions of molecular beam epitaxy and photoluminescence/positron annihilation spectroscopy apply without modification.
    The abstract invokes these techniques to interpret self-assembly and background suppression.

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Works this paper leans on

57 extracted references · 57 canonical work pages

  1. [1]

    Davies, Phys

    G. Davies, Phys. Rep. 1989, 176, 83. https://doi.org/10.1016/0370-1573(89)90064-1

  2. [2]

    Khoury, M

    M. Khoury, M. Abbarchi, J. Appl. Phys. 2022, 131, 200901. https://doi.org/10.1063/5.0093822

  3. [3]

    Redjem, A

    W. Redjem, A. Durand, T. Herzig, A. Benali, S. Pezzagna, J. Meijer, A. Y. Kuznetsov, H. S. Nguyen, S. Cueff, J.-M. Gérard, I. Robert-Philip, B. Gil, D. Caliste, P. Pochet, M. Abbarchi, V. Jacques, A. Dréau, G. Cassabois, Nat. Electron. 2020, 3, 738. https://doi.org/10.1038/s41928-020-00499-0

  4. [4]

    Hollenbach, Y

    M. Hollenbach, Y. Berencén, U. Kentsch, M. Helm, G. V. Astakhov, Opt. Express 2020, 28, 26111. https://doi.org/10.1364/OE.397377

  5. [5]

    D. B. Higginbottom, A. T. K. Kurkjian, C. Chartrand, M. Kazemi, N. A. Brunelle, E. R. MacQuarrie, J. R. Klein, N. R. Lee-Hone, J. Stacho, M. Ruether, C. Bowness, L. Bergeron, A. DeAbreu, S. R. Harrigan, J. Kanaganayagam, D. W. Marsden, T. S. Richards, L. A. Stott, S. Roorda, K. J. Morse, M. L. W. Thewalt, S. Simmons, Nature 2022, 607, 266. https://doi.org...

  6. [6]

    S. Wen, G. Pieplow, J. Yang, K. Jamshidi, M. Helm, J.-W. Luo, T. Schröder, S. Zhou, Y. Berencén, arXiv 2025, 2502.07632. https://doi.org/10.48550/arXiv.2502.07632

  7. [7]

    H. Song, X. Zhang, L. Komza, N. Fiaschi, Y. Xiong, Y. Zhi, S. Dhuey, A. Schwartzberg, T. Schenkel, G. Hautier, Z.-H. Zhang and A. Sipahigil, Nature Nanotechnology 2025, https://doi.org/10.1038/s41565-025-02066-0

  8. [8]

    Nature Reviews Physics , year = 2023, month = jun, volume =

    C. Couteau, S. Barz, T. Durt, T. Gerrits, J. Huwer, R. Prevedel, J. Rarity, A. Shields, G. Weihs, Nat. Rev. Phys. 2023, 5, 326. https://doi.org/10.1038/s42254-023-00583-2

  9. [9]

    Quantum internet: A vision for the road ahead,

    S. Wehner, D. Elkouss, R. Hanson, Science 2018, 362, 303. https://doi.org/10.1126/science.aam9288

  10. [10]

    A. M. Fox, Adv. Quantum Technol. 2025, 8, 2300390. https://doi.org/10.1002/qute.202300390

  11. [11]

    Prabhu, C

    M. Prabhu, C. Errando-Herranz, L. De Santis, I. Christen, C. Chen, C. Gerlach, D. Englund, Nat. Commun. 2023, 14, 2380. https://doi.org/10.1038/s41467-023-37655-x

  12. [12]

    Lefaucher, Y

    B. Lefaucher, Y. Baron, J.-B. Jager, V. Calvo, C. Elsässer, G. Coppola, F. Mazen, S. Kerdilès, F. Cache, A. Dréau, J.-M. Gérard, arXiv 2025, 2501.12744. https://doi.org/10.48550/arXiv.2501.12744 19

  13. [13]

    Nature Communications15(1), 6920 (2024) https: //doi.org/10.1038/s41467-024-51265-1

    L. Komza, P. Samutpraphoot, M. Odeh, Y.-L. Tang, M. Mathew, J. Chang, H. Song, M.-K. Kim, Y. Xiong, G. Hautier and A. Sipahigil, Nature Communications 2024, 15, 6920 https://doi.org/10.1038/s41467-024-51265-1

  14. [14]

    Dobinson, C

    M. Dobinson, C. Bowness, S. A. Meynell, C. Chartrand, E. Hoffmann, M. Gascoine, I. MacGilp, F. Afzal, C. Dangel, N. Jahed, M. L. W. Thewalt, S. Simmons, D. B. Higginbottom, Nat. Photon. 2025, 19, 1132. https://doi.org/10.1038/s41566-025- 01752-8

  15. [15]

    Life and death of colloidal bonds control the rate-dependent rheology of gels

    A. Buzzi, C. Papon, M. Pirro, O. Hooybergs, H. Raniwala, V. Saggio, C. Errando- Herranz, D. Englund, Nat. Commun. 2025, 16, 8829. https://doi.org/10.1038/s41467- 025-63871-8

  16. [16]

    Hollenbach, N

    M. Hollenbach, N. Klingner, N. S. Jagtap, L. Bischoff, C. Fowley, U. Kentsch, G. Hlawacek, A. Erbe, N. V. Abrosimov, M. Helm, Y. Berencén, G. V. Astakhov, Nat. Commun. 2022, 13, 7683. https://doi.org/10.1038/s41467-022-35051-5

  17. [17]

    Baron, A

    Y. Baron, A. Durand, T. Herzig, M. Khoury, S. Pezzagna, J. Meijer, I. Robert-Philip, M. Abbarchi, J.-M. Hartmann, S. Reboh, J.-M. Gérard, V. Jacques, G. Cassabois, A. Dréau, Appl. Phys. Lett. 2022, 121, 084003. https://doi.org/10.1063/5.0097407

  18. [18]

    A. M. Day, M. Sutula, J. R. Dietz, A. Raun, D. D. Sukachev, M. K. Bhaskar, E. L. Hu, Nature Communications 2024, 15, 4772 https://doi.org/10.1038/s41467-024-48968-w

  19. [19]

    Davies, S

    G. Davies, S. Hayama, L. Murin, R. Krause-Rehberg, V. Bondarenko, A. Sengupta, C. Davia, A. Karpenko, Phys. Rev. B 2006, 73, 165202. https://doi.org/10.1103/PhysRevB.73.165202

  20. [20]

    S. M. Buckley, A. N. Tait, G. Moody, B. Primavera, S. Olson, J. Herman, K. L. Silverman, S. P. Rao, S. W. Nam, R. P. Mirin, and J. M. Shainline, Opt. Express 2020, 28, 16057. https://doi.org/10.1364/OE.386450

  21. [21]

    J. F. Ziegler, M. D. Ziegler, J. P. Biersack, Nucl. Instrum. Methods Phys. Res., B 2010, 268, 1818. https://doi.org/10.1016/j.nimb.2010.02.091

  22. [22]

    Aberl, E

    J. Aberl, E. Prado Navarrete, M. Karaman, D. Haya Enriquez, C. Wilflingseder, A. Salomon, D. Primetzhofer, M. A. Schubert, G. Capellini, T. Fromherz, P. Deák, P. Udvarhelyi, S. Li, Á. Gali, M. Brehm, Adv. Mater. 2024, 36, 2408424. https://doi.org/10.1002/adma.202408424

  23. [23]

    Poempool, J

    T. Poempool, J. Aberl, Ma. Clementi, L. Spindlberger, L. Vukušić, M. Galli, D. Gerace, F. Fournel, Je.-M. Hartmann, F. Schäffler, M. Brehm, T. Fromherz, Opt. Express 2023, 31, 15564. https://doi.org/10.1364/OE.480281 20

  24. [24]

    Salomon, J

    A. Salomon, J. Aberl, E. Prado Navarrete, M. Karaman, O. E. Lang, D. Primetzhofer, P. Deák, Á. Gali, T. Fromherz, M. Brehm, ACS Photonics 2025, 12, 2364. https://doi.org/10.1021/acsphotonics.4c01662

  25. [25]

    Chartrand, L

    C. Chartrand, L. Bergeron, K. J. Morse, H. Riemann,N. V. Abrosimov, P. Becker, H.- J. Pohl, S. Simmons, M. L. W. Thewalt, Phys. Rev. B 2018, 98, 195201 https://link.aps.org/doi/10.1103/PhysRevB.98.195201

  26. [26]

    Arakawa \ and\ author M

    Y. Arakawa, M. J. Holmes, Appl. Phys. Rev. 2020, 7, 021309. https://doi.org/10.1063/5.0010193

  27. [27]

    Huber, M

    D. Huber, M. Reindl, J. Aberl, A. Rastelli, R. Trotta, J. Opt. 2018, 20, 073002. https://doi.org/10.1088/2040-8986/aac4c4

  28. [28]

    R. F. C. Farrow, Molecular beam epitaxy: Applications to Key Materials, Noyes Publications, 1995

  29. [29]

    Yabumoto, AIP Conf

    N. Yabumoto, AIP Conf. Proc. 1998, 449, 696. https://doi.org/10.1063/1.56895

  30. [30]

    Auguste, M.O

    R. Auguste, M.O. Liedke, M. Butterling, B.P. Uberuaga, F.A. Selim, A. Wagner, P. Hosemann, J. Appl. Phys. 2023, 133, 185901. https://doi.org/10.1063/5.0144308

  31. [31]

    Grodzicki, M.O

    M. Grodzicki, M.O. Liedke, K. Moszak, W. Olszewski, Ł. Pawlaczyk, D. Majchrzak, R. Idczak, D. Pucicki, J. Serafińczuk, M. Butterling, E. Hirschmann, A. Wagner, R. Kudrawiec, D. Hommel, Vacuum. 2024, 229, 113554. https://doi.org/10.1016/j.vacuum.2024.113554

  32. [32]

    Beaufils, W

    C. Beaufils, W. Redjem, E. Rousseau, V. Jacques, A. Y. Kuznetsov, C. Raynaud, C. Voisin, A. Benali, T. Herzig, S. Pezzagna, J. Meijer, M. Abbarchi, G. Cassabois, Phys. Rev. B 2018, 97, 035303. https://doi.org/10.1103/PhysRevB.97.035303

  33. [33]

    Binetti, S

    S. Binetti, S. Pizzini, E. Leoni, R. Somaschini, A. Castaldini, A. Cavallini, J. Appl. Phys. 2002, 92, 2437–2445. https://doi.org/10.1063/1.1497450

  34. [34]

    Baron, A

    Y. Baron, A. Durand, P. Udvarhelyi, T. Herzig, M. Khoury, S. Pezzagna, J. Meijer, I. Robert-Philip, M. Abbarchi, J.-M. Hartmann, V. Mazzocchi, J.-M. Gérard, A. Gali, V. Jacques, G. Cassabois, A. Dréau, ACS Photonics 2022, 9 (7), 2337-2345 https://doi.org/10.1021/acsphotonics.2c00336

  35. [35]

    Davies, E

    G. Davies, E. C. Lightowlers, Z. E. Ciechanowska, J. Phys. C: Solid State Phys. 20, 191 (1987). https://doi.org/10.1088/0022-3719/20/2/003

  36. [36]

    Surma, P

    B. Surma, P. Kaminski, A. Wnuk, and R. Kozlowski, Some new photoluminescence features of W line for neutron-irradiated MCz-Si and FZ-Si, 2008 IEEE Nuclear Science Symposium Conference Record (IEEE, New York, 2008). 21

  37. [37]

    PRX Quantum1, 020301 (2020) https://doi

    L. Bergeron, C. Chartrand, A. T. K. Kurkjian, K. J. Morse, H. Riemann, N. Abrosimov, P. Becker, H.-J. Pohl, H. M. Thewalt, S. Simmons, PRX Quantum 2020, 1, 020301. https://doi.org/10.1103/PRXQuantum.1.020301

  38. [38]

    Hakala, M.J

    M. Hakala, M.J. Puska, R.M. Nieminen, Phys. Rev. B. 1998, 57, 7621–7627 https://doi.org/10.1103/PhysRevB.57.7621

  39. [39]

    Assali, M

    S. Assali, M. Elsayed, J. Nicolas, M.O. Liedke, A. Wagner, M. Butterling, R. Krause- Rehberg, O. Moutanabbir, Appl. Phys. Lett. 2019, 114, 251907. https://doi.org/10.1063/1.5108878

  40. [40]

    Analysis of positron profiling data by means of ‘VEPFIT,

    A. van Veen, H. Schut, J. de Vries, R. A. Hakvoort, and M. R. Ijpma, “Analysis of positron profiling data by means of ‘VEPFIT,” in AIP Conference Proceedings 1991, 218 (1), 171–198, https://doi.org/doi:10.1063/1.40182

  41. [41]

    Salomon, J

    A. Salomon, J. Aberl, L. Vukušić, M. Hauser, T. Fromherz, M. Brehm, physica status solidi (a) 2022, 219, 2200154. https://doi.org/10.1002/pssa.202200154

  42. [42]

    Wilflingseder, J

    C. Wilflingseder, J. Aberl, E. Prado Navarrete, G. Hesser, H. Groiss, M. O. Liedke, M. Butterling, A. Wagner, E. Hirschmann, C. Corley-Wiciak, M. H. Zoellner, G. Capellini, T. Fromherz, M. Brehm, ACS Applied Electronic Materials 2024, 6 (12), 9029-9039. https://doi.org/10.1021/acsaelm.4c01678

  43. [43]

    L. Wind, S. Preiß, D. Nazzari, J. Aberl, E. Prado Navarrete, M. Brehm, L. Vogl, A. M. Minor, M. Sistani, W. M. Weber, Solid-State Electronics 2025, 225, 109069. https://doi.org/10.1016/j.sse.2025.109069

  44. [44]

    Fuchsberger, L

    A. Fuchsberger, L. Wind, D. Nazzari, L. Kühberger, D. Popp, J. Aberl, E. Prado Navarrete, M. Brehm, L. Vogl, P. Schweizer, S. Lellig, X. Maeder, M. Sistani, W. M. Weber, IEEE Journal of the Electron Devices Society 2024, 12, 83-87. https://doi.org/10.1109/JEDS.2024.3350209

  45. [45]

    Fuchsberger et al., IEEE Transactions on Electron Devices, 2025, 72, 6, 2868-

    A. Fuchsberger et al., IEEE Transactions on Electron Devices, 2025, 72, 6, 2868-

  46. [46]

    https://doi.org/10.1109/TED.2025.3559912

  47. [47]

    Fuchsberger, K

    A. Fuchsberger, K. Eysin, L. Wind, E. Prado Navarrete, J. Aberl, M. Brehm, I. Ratschinski, D. Hiller, M. Sistani, W. M. Weber, IEEE Electron Device Letters, 2025, 46, 8, 1429-1432 https://doi.org/10.1109/LED.2025.3577243

  48. [48]

    Oehme, M

    M. Oehme, M. Bauer, C. P. Parry, G. Eifler, E. Kasper, Thin Solid Films 2000, 380, 75-77 https://doi.org/10.1016/S0040-6090(00)01533-9

  49. [49]

    Attallah, N

    A.G. Attallah, N. Koehler, M.O. Liedke, M. Butterling, E. Hirschmann, R. Ecke, S.E. Schulz, A. Wagner, Microporous Mesoporous Mater. 2020, 308, 110457. https://doi.org/10.1016/j.micromeso.2020.110457 22

  50. [50]

    Anwand, G

    W. Anwand, G. Brauer, M. Butterling, H. R. Kissener, and A. Wagner, Defect Diffus. Forum, 2012, 331, 25–40 https://doi.org/doi:10.4028/www.scientific.net/DDF.331.25

  51. [51]

    Dryzek and P

    J. Dryzek and P. Horodek, Nucl. Instruments Methods Phys. Res. Sect. B Beam Interact. with Mater. Atoms, 2008, 266 (18), 4000–4009 https://doi.org/doi:10.1016/j.nimb.2008.06.033

  52. [52]

    van Veen, H

    A. van Veen, H. Schut, M. Clement, J. M. M. de Nijs, A. Kruseman, and M. R. IJpma, Appl. Surf. Sci., 1995, 85 ©, 216–224 https://doi.org/doi:10.1016/0169- 4332(94)00334-3

  53. [53]

    Hoppe, F

    C. Hoppe, F. Mitschker, M. Butterling, M.O. Liedke, T. de Los Arcos, P. Awakowicz, A. Wagner, G. Grundmeier, J. Phys. D. Appl. Phys. 2020, 53, 475205 https://doi.org/10.1088/1361-6463/aba8ba

  54. [54]

    Čížek et al., Phys

    J. Čížek et al., Phys. B Condens. Matter, 2012, 407 (14), 2659–2664, https://doi.org/doi:10.1016/j.physb.2011.12.122

  55. [55]

    Tuomisto, I

    F. Tuomisto, I. Makkonen, Rev. Mod. Phys. 2013, 85, 1583–1631 https://doi.org/10.1103/RevModPhys.85.1583

  56. [56]

    , Vol. 127 of Series

    R. Krause-Rehberg, H.S. Leipner, Positron Annihilation in Semiconductors", Vol. 127 of Series "Solid-State Sciences", Springer-Verlag, Berlin 1999

  57. [57]

    Asoka‐Kumar, K.G

    P. Asoka‐Kumar, K.G. Lynn, D.O. Welch, J. Appl. Phys. 1994, 76, 4935–4982 https://doi.org/10.1063/1.357207 23 Supporting Information Self-Assembled Telecom Color Centers in Silicon and their Growth Environment Jacqueline Marböck*, Enrique Prado Navarrete, Merve Karaman, Oliver E. Lang, Thomas Fromherz, Maciej O. Liedke, Andreas Wagner, Moritz Brehm*, Joha...