SiMOS quantum-dot spin qubits enabled by extreme-ultraviolet lithography | Paper Citation Record

Observation c549d4b2-96f4-46c1-aeb6-3e35b3cf35cc · outbound

This paper cites & DiVincenzo, D.

SiMOS quantum-dot spin qubits enabled by extreme-ultraviolet lithography & DiVincenzo, D

Reference 1

Resolution: malformed identifier; no resolver link, observed 2026-08-02T06:13:31.715002Z

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Observation 856e6e1c-baf9-4b9d-aed6-92796c877262 · outbound

This paper cites an unresolved cited work.

SiMOS quantum-dot spin qubits enabled by extreme-ultraviolet lithography Unresolved cited work

Reference 2

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Observation 1a3f6271-32b0-48ce-8510-e88068b50539 · outbound

This paper cites URLhttps://www.nature.com /articles/nnano.2014.216.

SiMOS quantum-dot spin qubits enabled by extreme-ultraviolet lithography URLhttps://www.nature.com /articles/nnano.2014.216

Reference 3

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Observation e106eecd-04cb-4064-a7df-56540d9b61ca · outbound

This paper cites A.et al.Silicon quantum electronics.

SiMOS quantum-dot spin qubits enabled by extreme-ultraviolet lithography A.et al.Silicon quantum electronics

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Resolution: verified exact; doi, observed 2026-08-02T06:18:47.536718Z

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Observation c3c0d846-17ed-4c05-a48b-2f6f72cc35a5 · outbound

This paper cites URL https://www.nature.com/articles/s41586-021-034 69-4.

SiMOS quantum-dot spin qubits enabled by extreme-ultraviolet lithography URL https://www.nature.com/articles/s41586-021-034 69-4

Reference 5

Resolution: unresolved; no resolver link, observed 2026-08-02T06:13:31.925589Z

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Observation bfe43829-d340-4d70-8c7b-e288aef0ef8f · outbound

This paper cites URLhttps://www.na ture.com/articles/ncomms13575.

SiMOS quantum-dot spin qubits enabled by extreme-ultraviolet lithography URLhttps://www.na ture.com/articles/ncomms13575

Reference 6

Resolution: unresolved; no resolver link, observed 2026-08-02T06:13:31.873646Z

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Observation d7e3a0e4-1b90-4bff-b3d3-257d7d5832ff · outbound

This paper cites J.et al.A cryogenic CMOS chip for generating control signals for multiple qubits.Nature Electronics4, 64–70 (2021).

SiMOS quantum-dot spin qubits enabled by extreme-ultraviolet lithography J.et al.A cryogenic CMOS chip for generating control signals for multiple qubits.Nature Electronics4, 64–70 (2021)

Reference 7

Resolution: unresolved; no resolver link, observed 2026-08-02T06:13:32.027822Z

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Observation 7447cce8-c362-4d69-93e7-d160a99c60d3 · outbound

This paper cites URL https://www.nature.com/articles/s41928-021-006 87-6.

SiMOS quantum-dot spin qubits enabled by extreme-ultraviolet lithography URL https://www.nature.com/articles/s41928-021-006 87-6

Reference 8

Resolution: unresolved; no resolver link, observed 2026-08-02T06:13:31.976631Z

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Observation 22cde8b3-32cd-4010-b99e-1249afe7903d · outbound

This paper cites URLhttp s://www.nature.com/articles/s41586-024-07275-6.

SiMOS quantum-dot spin qubits enabled by extreme-ultraviolet lithography URLhttp s://www.nature.com/articles/s41586-024-07275-6

Reference 9

Resolution: unresolved; no resolver link, observed 2026-08-02T06:13:32.138737Z

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Observation 40e5b157-98d5-4e1d-83ad-cd2c6f9683a3 · outbound

This paper cites & Loss, D.

SiMOS quantum-dot spin qubits enabled by extreme-ultraviolet lithography & Loss, D

Reference 10

Resolution: unresolved; no resolver link, observed 2026-08-02T06:13:32.090064Z

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Observation 793c308b-c93a-471d-90e4-af141357e471 · outbound

This paper cites C.et al.12-Spin-Qubit Arrays Fabricated on a 300 mm Semiconductor Manufacturing Line.Nano Letters25, 793–799 (2025).

SiMOS quantum-dot spin qubits enabled by extreme-ultraviolet lithography C.et al.12-Spin-Qubit Arrays Fabricated on a 300 mm Semiconductor Manufacturing Line.Nano Letters25, 793–799 (2025)

Reference 11

Resolution: unresolved; no resolver link, observed 2026-08-02T06:13:32.236526Z

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Observation 73b0bf31-dad9-488e-aa61-df95a3948666 · outbound

This paper cites URLhttps://www.nature.com/art icles/s41534-024-00864-3.

SiMOS quantum-dot spin qubits enabled by extreme-ultraviolet lithography URLhttps://www.nature.com/art icles/s41534-024-00864-3

Reference 12

Resolution: unresolved; no resolver link, observed 2026-08-02T06:13:32.178576Z

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Observation f3205763-5a40-4bda-8c27-152f0b2c3c98 · outbound

This paper cites A digitally controlled silicon quantum processing unit.

SiMOS quantum-dot spin qubits enabled by extreme-ultraviolet lithography A digitally controlled silicon quantum processing unit

Reference 13

Resolution: unresolved; no resolver link, observed 2026-08-02T06:13:32.247149Z

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Observation a0b8614c-89fc-48a3-a126-05d04058e78c · outbound

This paper cites K.et al.Spin-qubit control with a milli-kelvin CMOS chip.Nature643, 382–387 (2025).

SiMOS quantum-dot spin qubits enabled by extreme-ultraviolet lithography K.et al.Spin-qubit control with a milli-kelvin CMOS chip.Nature643, 382–387 (2025)

Reference 14

Resolution: unresolved; no resolver link, observed 2026-08-02T06:13:32.243536Z

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Observation b3f189a2-ff58-4c1d-a341-b32becae047b · outbound

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SiMOS quantum-dot spin qubits enabled by extreme-ultraviolet lithography Unresolved cited work

Reference 15

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Observation 93da7bf7-05e2-4fd0-ac75-586a45ee0134 · outbound

This paper cites URLhttps://www.nature.c om/articles/s44287-026-00283-w.

SiMOS quantum-dot spin qubits enabled by extreme-ultraviolet lithography URLhttps://www.nature.c om/articles/s44287-026-00283-w

Reference 16

Resolution: unresolved; no resolver link, observed 2026-08-02T06:13:32.251207Z

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Observation 701915b1-d054-47ca-adb0-b73455e058b5 · outbound

This paper cites T., Terhal, B.

SiMOS quantum-dot spin qubits enabled by extreme-ultraviolet lithography T., Terhal, B

Reference 17

Resolution: unresolved; no resolver link, observed 2026-08-02T06:13:32.261986Z

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Observation 80ff0c80-b0df-47bd-b618-a5b52f301094 · outbound

This paper cites an unresolved cited work.

SiMOS quantum-dot spin qubits enabled by extreme-ultraviolet lithography Unresolved cited work

Reference 18

Resolution: unresolved; no resolver link, observed 2026-08-02T06:13:32.258419Z

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Observation 3a5b9222-635c-484e-9b48-42fa8deeacb9 · outbound

This paper cites URL https://www.nature.com/articles/s41565-017-001 4-x.

SiMOS quantum-dot spin qubits enabled by extreme-ultraviolet lithography URL https://www.nature.com/articles/s41565-017-001 4-x

Reference 19

Resolution: unresolved; no resolver link, observed 2026-08-02T06:13:32.269508Z

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Observation 0952c29a-428a-4d60-bebe-729a98292e5a · outbound

This paper cites an unresolved cited work.

SiMOS quantum-dot spin qubits enabled by extreme-ultraviolet lithography Unresolved cited work

Reference 20

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Observation 124571c9-938e-4e03-a3b0-cbd3351fbbd9 · outbound

This paper cites URLhttps://www.nature.com/articles/s415 86-021-04182-y.

SiMOS quantum-dot spin qubits enabled by extreme-ultraviolet lithography URLhttps://www.nature.com/articles/s415 86-021-04182-y

Reference 21

Resolution: unresolved; no resolver link, observed 2026-08-02T06:13:32.277099Z

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Observation a9556dfc-a58a-4b83-8ab5-1aaa49dab4ec · outbound

This paper cites H.et al.Silicon qubit fidelities approaching in- coherent noise limits via pulse engineering.Nature Elec- tronics2, 151–158 (2019).

SiMOS quantum-dot spin qubits enabled by extreme-ultraviolet lithography H.et al.Silicon qubit fidelities approaching in- coherent noise limits via pulse engineering.Nature Elec- tronics2, 151–158 (2019)

Reference 22

Resolution: unresolved; no resolver link, observed 2026-08-02T06:13:32.273350Z

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Observation 07244a3d-179c-4705-9a7f-f60f823b18f7 · outbound

This paper cites R.et al.Two-qubit silicon quantum processor with operation fidelity exceeding 99%.Science Advances 8, eabn5130 (2022).

SiMOS quantum-dot spin qubits enabled by extreme-ultraviolet lithography R.et al.Two-qubit silicon quantum processor with operation fidelity exceeding 99%.Science Advances 8, eabn5130 (2022)

Reference 23

Resolution: unresolved; no resolver link, observed 2026-08-02T06:13:32.284184Z

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Observation be946558-0465-4c88-8592-c246cf4d91cc · outbound

This paper cites URLhttps://www.nature.com/articles/s41586-021 -04273-w.

SiMOS quantum-dot spin qubits enabled by extreme-ultraviolet lithography URLhttps://www.nature.com/articles/s41586-021 -04273-w

Reference 24

Resolution: unresolved; no resolver link, observed 2026-08-02T06:13:32.280629Z

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Observation 5c94bf66-417b-42cc-a416-90b79217049e · outbound

This paper cites URLhttps://www.nature.com/articles/s414 67-025-57987-0.

SiMOS quantum-dot spin qubits enabled by extreme-ultraviolet lithography URLhttps://www.nature.com/articles/s414 67-025-57987-0

Reference 25

Resolution: unresolved; no resolver link, observed 2026-08-02T06:13:32.291350Z

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Observation 6391ad9c-e45f-41bb-b3e0-37c90f5e7c7b · outbound

This paper cites URLhttps://www.nature.com /articles/s41567-024-02614-w.

SiMOS quantum-dot spin qubits enabled by extreme-ultraviolet lithography URLhttps://www.nature.com /articles/s41567-024-02614-w

Reference 26

Resolution: unresolved; no resolver link, observed 2026-08-02T06:13:32.287898Z

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Observation 68003a83-8032-4f9b-8700-2d315230c976 · outbound

This paper cites URLhttps://linkinghub.elsevier.

SiMOS quantum-dot spin qubits enabled by extreme-ultraviolet lithography URLhttps://linkinghub.elsevier

Reference 27

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Observation 1a388e37-856b-4791-874b-8f06fd06e458 · outbound

This paper cites URLhttps://www.nature.com/articles/s4 1586-025-09531-9.

SiMOS quantum-dot spin qubits enabled by extreme-ultraviolet lithography URLhttps://www.nature.com/articles/s4 1586-025-09531-9

Reference 28

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Observation 7555ab04-9f1e-46d4-aafa-8e10d606426c · outbound

This paper cites URLhttps://www.nature.com/article s/s41565-023-01491-3.

SiMOS quantum-dot spin qubits enabled by extreme-ultraviolet lithography URLhttps://www.nature.com/article s/s41565-023-01491-3

Reference 29

Resolution: unresolved; no resolver link, observed 2026-08-02T06:13:32.305812Z

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Observation dea66321-7ae2-4025-aae4-d8cd6dc0ad33 · outbound

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SiMOS quantum-dot spin qubits enabled by extreme-ultraviolet lithography Unresolved cited work

Reference 30

Resolution: unresolved; no resolver link, observed 2026-08-02T06:13:32.302262Z

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Observation 7f3493a4-dcb9-4e73-b445-4613d3cef9bb · outbound

This paper cites URLhttps://www.nature.com/articles/s41598- 0 26-42575-z.

SiMOS quantum-dot spin qubits enabled by extreme-ultraviolet lithography URLhttps://www.nature.com/articles/s41598- 0 26-42575-z

Reference 31

Resolution: unresolved; no resolver link, observed 2026-08-02T06:13:32.313165Z

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Observation 284470dc-8542-4441-9529-7b958ab85631 · outbound

This paper cites URLhttps://www.nature.com/articles/s419 28-026-01569-5.

SiMOS quantum-dot spin qubits enabled by extreme-ultraviolet lithography URLhttps://www.nature.com/articles/s419 28-026-01569-5

Reference 32

Resolution: unresolved; no resolver link, observed 2026-08-02T06:13:32.309324Z

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Observation bca3f976-1495-48ac-9a4f-ad927962f369 · outbound

This paper cites & Kazazis, D.

SiMOS quantum-dot spin qubits enabled by extreme-ultraviolet lithography & Kazazis, D

Reference 33

Resolution: unresolved; no resolver link, observed 2026-08-02T06:13:32.320543Z

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Observation 63b75d9b-5a00-4690-8853-9bfb77761a2d · outbound

This paper cites H.et al.CMOS Scaling for the 5 nm Node and Beyond: Device, Process and Technology.Nanoma- terials14, 837 (2024).

SiMOS quantum-dot spin qubits enabled by extreme-ultraviolet lithography H.et al.CMOS Scaling for the 5 nm Node and Beyond: Device, Process and Technology.Nanoma- terials14, 837 (2024)

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Resolution: unresolved; no resolver link, observed 2026-08-02T06:13:32.316693Z

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Observation 60a81c4f-aea0-4ba6-955c-2e4a8f759622 · outbound

This paper cites J., Williams, J.

SiMOS quantum-dot spin qubits enabled by extreme-ultraviolet lithography J., Williams, J

Reference 35

Resolution: verified exact; doi, observed 2026-08-02T06:18:47.312535Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-16T06:30:59.297886+00:00.

Observation 0b071829-a8f2-404e-b960-5ffe369bde08 · outbound

This paper cites InOptical Microlithography XXXI, vol.

SiMOS quantum-dot spin qubits enabled by extreme-ultraviolet lithography InOptical Microlithography XXXI, vol

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Resolution: malformed identifier; no resolver link, observed 2026-08-02T06:13:32.324044Z

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Observation 537baf3b-3355-4ee1-843f-d54512e19881 · outbound

This paper cites URLhttps://quantum-journal.org/papers/ q-2021-10-05-557/.

SiMOS quantum-dot spin qubits enabled by extreme-ultraviolet lithography URLhttps://quantum-journal.org/papers/ q-2021-10-05-557/

Reference 37

Resolution: unresolved; no resolver link, observed 2026-08-02T06:13:32.336075Z

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Observation f89f876d-2af8-4531-99f2-0dcc7369079e · outbound

This paper cites URLhttps://www.nature.com/articles/ncom ms14485.

SiMOS quantum-dot spin qubits enabled by extreme-ultraviolet lithography URLhttps://www.nature.com/articles/ncom ms14485

Reference 38

Resolution: unresolved; no resolver link, observed 2026-08-02T06:13:32.332535Z

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Observation a6d0f7a3-9e5e-45f6-bd02-bde28492a387 · outbound

This paper cites In2025 IEEE International Electron Devices Meeting (IEDM), 1–4 (IEEE, San Francisco, CA, USA, 2025).

SiMOS quantum-dot spin qubits enabled by extreme-ultraviolet lithography In2025 IEEE International Electron Devices Meeting (IEDM), 1–4 (IEEE, San Francisco, CA, USA, 2025)

Reference 39

Resolution: unresolved; no resolver link, observed 2026-08-02T06:13:32.343246Z

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Observation 80228cc7-6484-4988-a756-9a5290e51bbf · outbound

This paper cites G., Mariantoni, M., Martinis, J.

SiMOS quantum-dot spin qubits enabled by extreme-ultraviolet lithography G., Mariantoni, M., Martinis, J

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Resolution: malformed identifier; no resolver link, observed 2026-08-02T06:13:32.339671Z

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Observation 0a2c2bdc-6944-4eb6-9e9d-9e839c67518b · outbound

This paper cites In2020 IEEE International Electron Devices Meeting (IEDM), 38.3.1–38.3.4 (IEEE, San Francisco, CA, USA, 2020).

SiMOS quantum-dot spin qubits enabled by extreme-ultraviolet lithography In2020 IEEE International Electron Devices Meeting (IEDM), 38.3.1–38.3.4 (IEEE, San Francisco, CA, USA, 2020)

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Resolution: unresolved; no resolver link, observed 2026-08-02T06:13:32.351306Z

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Observation 9771a175-9dac-49f6-846e-5ada8c30266d · outbound

This paper cites In Farrell, R.

SiMOS quantum-dot spin qubits enabled by extreme-ultraviolet lithography In Farrell, R

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Resolution: verified exact; doi, observed 2026-08-02T06:18:47.079149Z

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No event found in the named queried sources as of 2026-08-16T06:30:59.297886+00:00.

Observation cbc4623d-e3ec-483a-8790-6a1952168575 · outbound

This paper cites URLhttps://pubs.aip.org/apl/article/124 /11/114003/3272522/Silicon-spin-qubit-noise-cha racterization-using.

SiMOS quantum-dot spin qubits enabled by extreme-ultraviolet lithography URLhttps://pubs.aip.org/apl/article/124 /11/114003/3272522/Silicon-spin-qubit-noise-cha racterization-using

Reference 43

Resolution: unresolved; no resolver link, observed 2026-08-02T06:13:32.359005Z

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Observation 94c7145c-4390-4cba-8008-d38e87d9f712 · outbound

This paper cites Understanding oxide-thickness-dependent variability in dense Si-MOS quantum dot arrays.

SiMOS quantum-dot spin qubits enabled by extreme-ultraviolet lithography Understanding oxide-thickness-dependent variability in dense Si-MOS quantum dot arrays

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Resolution: unresolved; no resolver link, observed 2026-08-02T06:13:32.354780Z

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Observation 68662d6e-bf56-419f-9c21-ddb690ca9ca4 · outbound

This paper cites D.et al.Demonstration of 99.9% single qubit control fidelity of a silicon quantum dot spin qubit made in a 300 mm foundry process.

SiMOS quantum-dot spin qubits enabled by extreme-ultraviolet lithography D.et al.Demonstration of 99.9% single qubit control fidelity of a silicon quantum dot spin qubit made in a 300 mm foundry process

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Resolution: unresolved; no resolver link, observed 2026-08-02T06:13:32.366277Z

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Observation 1f296bdb-0ae0-4b73-8da5-34c054404675 · outbound

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SiMOS quantum-dot spin qubits enabled by extreme-ultraviolet lithography Nature526, 410–414 (2015)

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Resolution: unresolved; no resolver link, observed 2026-08-02T06:13:32.362515Z

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Observation 4f6f4195-2444-44ac-b7ba-ca55e5edfe2f · outbound

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SiMOS quantum-dot spin qubits enabled by extreme-ultraviolet lithography Physical Review Letters116, 110402 (2016)

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Resolution: verified exact; doi, observed 2026-08-02T06:18:46.832673Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-16T06:30:59.297886+00:00.

Observation 55dc44a8-a65d-489b-a1ee-d07f89234ac7 · outbound

This paper cites an unresolved cited work.

SiMOS quantum-dot spin qubits enabled by extreme-ultraviolet lithography Unresolved cited work

Reference 48

Resolution: unresolved; no resolver link, observed 2026-08-02T06:13:32.370181Z

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Observation 873dacd5-fea1-45b6-a7ae-ce9c67377f0d · outbound

This paper cites URLhttps://iopscience.iop.org/a rticle/10.1088/2058-9565/ab8aa4.

SiMOS quantum-dot spin qubits enabled by extreme-ultraviolet lithography URLhttps://iopscience.iop.org/a rticle/10.1088/2058-9565/ab8aa4

Reference 49

Resolution: verified exact; doi, observed 2026-08-02T06:18:46.687988Z

Source-reported events for the cited work

No event found in the named queried sources as of 2026-08-16T06:30:59.297886+00:00.

Observation 367eb403-2457-4c52-acd6-4d605fa454bc · outbound

This paper cites Y.et al.High-fidelity spin qubit operation and algorithmic initialization above 1 K.Nature627, 772– 777 (2024).

SiMOS quantum-dot spin qubits enabled by extreme-ultraviolet lithography Y.et al.High-fidelity spin qubit operation and algorithmic initialization above 1 K.Nature627, 772– 777 (2024)

Reference 50

Resolution: unresolved; no resolver link, observed 2026-08-02T06:13:32.377921Z

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Observation e55815c2-6fc8-4ee7-93a1-7ab99f4e5536 · outbound

This paper cites URLhttps://link.aps.o rg/doi/10.1103/PRXQuantum.6.030202.

SiMOS quantum-dot spin qubits enabled by extreme-ultraviolet lithography URLhttps://link.aps.o rg/doi/10.1103/PRXQuantum.6.030202

Reference 51

Resolution: unresolved; no resolver link, observed 2026-08-02T06:13:32.389299Z

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Observation 43c4802e-24d8-4bf5-ba84-41fffa37057b · outbound

This paper cites Quantum Characterization, Verification, and Validation.

SiMOS quantum-dot spin qubits enabled by extreme-ultraviolet lithography Quantum Characterization, Verification, and Validation

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Resolution: unresolved; no resolver link, observed 2026-08-02T06:13:32.385058Z

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Observation 2c3e8a99-b0b5-4ba4-b31a-90b756f8d9c3 · outbound

This paper cites In2025 IEEE International Electron Devices Meeting (IEDM), 1–4 (IEEE, San Francisco, CA, USA, 2025).

SiMOS quantum-dot spin qubits enabled by extreme-ultraviolet lithography In2025 IEEE International Electron Devices Meeting (IEDM), 1–4 (IEEE, San Francisco, CA, USA, 2025)

Reference 53

Resolution: unresolved; no resolver link, observed 2026-08-02T06:13:32.396482Z

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Observation 095ffaba-5dfb-4886-9ba8-2ee36699ac70 · outbound

This paper cites J.et al.Rapid cryogenic characterization of 1,024 integrated silicon quantum dot devices.Nature Electronics8, 75–83 (2025).

SiMOS quantum-dot spin qubits enabled by extreme-ultraviolet lithography J.et al.Rapid cryogenic characterization of 1,024 integrated silicon quantum dot devices.Nature Electronics8, 75–83 (2025)

Reference 54

Resolution: unresolved; no resolver link, observed 2026-08-02T06:13:32.392904Z

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Observation ccb660a5-1faa-430c-9b3a-69716423fe22 · outbound

This paper cites 1) between GL2 and GL3 measured after GL3 lithography.

SiMOS quantum-dot spin qubits enabled by extreme-ultraviolet lithography 1) between GL2 and GL3 measured after GL3 lithography

Reference 110

Resolution: malformed identifier; no resolver link, observed 2026-08-02T06:13:31.488663Z

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