Possibilities of application of elastic mid-IR light scattering for inspection of internal gettering operations
classification
❄️ cond-mat.mtrl-sci
cond-mat.mes-hallphysics.optics
keywords
crystalsscatteringgetteringinspectioninternallightmid-irprocess
read the original abstract
A method of low-angle mid-IR light scattering is shown to be applicable for the contactless and non-destructive inspection of the internal gettering process in CZ Si crystals. A classifcation of scattering inhomogeneities in initial crystals and crystals subjected to the getting process is presented.
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